IEEE Transactions on Semiconductor Manufacturing

Basic Information

Brief Name: IEEE T SEMICONDUCT M

Impact Factor: 2.3

ISSN: 0894-6507

Research Field: ENGINEERING TECHNOLOGY

h-index: 59

Self-citation Rate: 13%

Articles per Year: 74

SCI Index Status: Science Citation Index Expanded

Journal Website: https://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=66

Journal Introduction:

The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.

CiteScore

5.2

SJR

0.967

SNIP

1.237

Subject	Rank	Percentile
EngineeringIndustrial and Manufacturing Engineering	114 / 384	70%

Journal Statistics

Quarterly

Issues/Year

Review Cycle

Article Processing Fee

Submission Information

Submission Website:

http://mc.manuscriptcentral.com/tsm-ieee

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Small size yet big action: a simple sulfate anion templated a discrete 78-nuclearity silver sulfur nanocluster with a multishell structure

Li-Ping Cheng, Zhi Wang, Qiao-Yu Wu, Hai-Feng Su, Tao Peng, Geng-Geng Luo, Yan-An Li, Di Sun, Lan-Sun Zheng

2018-02-07 Communication

DOI: 10.1039/C8CC00014J

Ether-functionalization of monoethanolamine (MEA) for reversible CO2 capture under solvent-free conditions with high-capacity and low-viscosity

An-Hua Liu, Jie-Jie Li, Bai-Hao Ren, Xin-Ru Sha, He Jiang, Xiao-Bing Lu

2019-12-04 Paper

DOI: 10.1039/C9SE00756C

Outstanding Reviewers for ChemComm in 2020

2021-05-26 Editorial

DOI: 10.1039/D1CC90162A

Solventless thermal crosslinked polymer protective layer for high stable lithium metal batteries

Hyunjin Kim, Jeeyoung Yoo

2019-12-10 Communication

DOI: 10.1039/C9SE01046G

A hollow neuronal carbon skeleton with ultrahigh pyridinic N content as a self-supporting potassium-ion battery anode

Yongwen Sun, Ya Zhang, Zheng Xing, Denghu Wei, Quanchao Zhuang

2019-12-06 Paper

DOI: 10.1039/C9SE00889F

Selective production of monocyclic aromatic hydrocarbons from ex situ catalytic fast pyrolysis of pine over the HZSM-5 catalyst with calcium formate as a hydrogen source

Kai Li, Ze-xiang Wang, Guan Zhang, Min-shu Cui, Qiang Lu, Yong-ping Yang

2019-10-28 Paper

DOI: 10.1039/C9SE00605B

Inside back cover

2021-06-15 Cover

DOI: 10.1039/D1CC90214H

From zinco(ii) arsaketenes to silylene-stabilised zinco arsinidene complexes

Ernesto Ballestero-Martínez, Terrance J. Hadlington, Tibor Szilvási, Shenglai Yao, Matthias Driess

2018-04-16 Communication

DOI: 10.1039/C8CC01928B

Catalogue of self-targeting nano-medical inventions to accelerate clinical trials

Samar A. Alsudir

2021-04-15 Review Article

DOI: 10.1039/D1BM00235J

Highly efficient and durable III–V semiconductor-catalyst photocathodes via a transparent protection layer

Shinjae Hwang, James L. Young, Rachel Mow, Mengjun Li, Hongbin Yang, Philip E. Batson, Martha Greenblatt, Myles A. Steiner, Daniel Friedman, Todd G. Deutsch, Eric Garfunkel

2020-01-03 Paper

DOI: 10.1039/C9SE01264H

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