IEEE Transactions on Semiconductor Manufacturing
基本情報
The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.
CiteScore
| 分野 | ランク | パーセンタイル |
|---|---|---|
EngineeringIndustrial and Manufacturing Engineering |
114 / 384 | 70% |
ジャーナル統計
投稿情報
関連論文
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