IEEE Transactions on Semiconductor Manufacturing
基本信息
The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.
CiteScore
| 学科 | 排名 | 百分位 |
|---|---|---|
EngineeringIndustrial and Manufacturing Engineering |
114 / 384 | 70% |
期刊统计
投稿信息
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Journal of the Chinese Chemical Society
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